During semiconductor manufacturing, internal equipment components must operate under demanding conditions involving high temperatures, chemical exposure, cleanliness requirements, and precision machining.

With its chemical resistance, high-temperature resistance, low extractables, and dimensional stability, PEEK has become a material choice for many critical components.

01. CMP Retaining Ring

CMP Chemical Mechanical Polishing Process

Where Is PEEK Used in Semiconductor Equipment? Image 1

CMP retaining rings are critical positioning components used in the chemical mechanical polishing process. Installed at the polishing head station, they firmly secure the outer edge of an 8-inch wafer to prevent wafer displacement or flying during high-speed polishing, ensuring the flatness of the entire wafer surface.

PEEK offers wear resistance without generating microparticles, helping prevent scratches on the wafer’s photolithographic surface. Its chemical resistance also allows it to withstand long-term immersion in polishing slurry, making it a key positioning component for ensuring wafer process yield.

02. 12-Inch Guide

Inside Batch Cleaning Equipment

Where Is PEEK Used in Semiconductor Equipment? Image 2

The complete frame assembly is installed inside the chemical tank of batch cleaning equipment. The centrally positioned toothed open structure serves as a cleaning boat for holding multiple wafers.

The openings allow cleaning chemicals to flow fully across both sides of the wafers, improving the uniformity of wet etching and rinsing processes.

The vertical structures on both sides serve as 12-inch guide and positioning slots, providing trajectory guidance when robotic arms pick up and place wafers. The specially shaped base on the side serves as a chamber mounting and fixing base, which is locked onto the cleaning tank chamber through a fastening mechanism. It resists chemical corrosion and maintains its shape.

Tips

12-Inch Wafer Guidance and Positioning

Used inside batch cleaning equipment, these components perform wafer guidance, positioning, and structural fixing functions.

03. Motor Housing Components

Built-In Miniature Drive Motors in Precision Semiconductor Equipment

Where Is PEEK Used in Semiconductor Equipment? Image 3

This motor housing is precision-machined from virgin PEEK5600G and is primarily used as a protective housing for built-in miniature drive motors in precision semiconductor equipment.

Made from virgin PEEK, it combines excellent electrical insulation and high-temperature resistance. It can isolate electromagnetic interference and help prevent electrical leakage risks. It also resists chemical vapors inside equipment, maintains dimensional stability during long-term operation, and does not release low-molecular-weight substances that could contaminate clean chambers.

The housing provides motor protection, insulation and shielding, vibration damping, and thermal insulation. It isolates dust and corrosive moisture, helping ensure the stable and long-term operation of miniature motors under clean and demanding conditions while meeting the precision transmission requirements of semiconductor cleanroom production.

04. Tank Cleaning Lift Pins / End Effectors

For Wafer Handling, Supporting, Lifting, and Alignment

Where Is PEEK Used in Semiconductor Equipment? Image 4

These components are used at wafer handling stations in semiconductor batch cleaning equipment and are made from virgin PEEK.

Due to its resistance to acidic and alkaline cleaning chemicals, low extractables, cleanliness, high-temperature resistance, and low coefficient of friction, PEEK helps prevent wafer scratching, supports wafer cleanliness, and is suitable for demanding wet cleaning environments.

The end effectors are responsible for smoothly gripping and supporting wafers while transferring them into and out of chemical tanks. The lift pins work together to lift and position wafers, completing wafer alignment and unloading operations.

Together, these components enable stable wafer transfer, helping avoid impact damage and contamination while meeting the precision production requirements of semiconductor manufacturing processes.

Why PEEK?

High-Temperature Resistance

Withstands high-temperature environments over extended periods.

Chemical Resistance

Resistant to acids, alkalis, and various chemical solutions.

Low Extractables

Clean and contamination-free.

Dimensional Stability

Maintains its shape without deformation during long-term use.

In semiconductor equipment, material performance

must ultimately be applied to every precision component.

From Materials to Applications

From Products to Real-World Operations

These precision PEEK components

are serving

different application scenarios

in semiconductor equipment.

If you are also interested in

PEEK materials, precision machining,

and semiconductor equipment component applications,

welcome to the Wuxi CSEAC Equipment Annual Conference.

We look forward to meeting and exchanging ideas with you.